Research and Development Tax Credit for Semiconductors

Administered by Business Oregon and Oregon Department of Revenue · Oregon

BENEFIT

15% credit

Deadline type: annual

Eligibility Requirements

1Eligible companies receive roughly 15% tax credit for qualified R&D expenses
2Up to $4 million per taxpayer per year
3Partially refundable for companies with 3,000 or fewer employees
4Available through tax year 2029

Eligible Project Types

CommercialIndustrial

STACKING POTENTIAL

Research and Development Tax Credit for Semiconductors is stackable — it can be combined with other federal, state, and local programs on the same project. Michigan and Ohio projects commonly stack this program with Federal Historic Tax Credit, New Markets Tax Credit, and Opportunity Zone deferral to maximize total incentive value. Use GrantRadar to see your full stack.

AFTER YOU WIN

View the Research and Development Tax Credit for Semiconductors compliance checklist →

Reporting deadlines, vendor rules, and the disallowed-cost pitfalls that trigger clawbacks.

Source: Business Oregon and Oregon Department of Revenue official program page ↗ · Last verified 2026-06-23

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STACKABLE WITH

Michigan Community Revitalization Program

Up to $10M · Direct Grant

Michigan Historic Preservation Tax Credit

25% credit · Tax Credit

Michigan Brownfield TIF

Negotiated / contact agency · Tax Increment Financing

Michigan Business Development Program

Up to $10M · Direct Grant

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